Ebara Corporation

Kabushiki Kaisha Toshiba

Other

Ryoichi Shinjo

Minoru Harada

Yukiko Nishioka

Ichiro Kamiya

Manabu Tsujimura

Rempei Nakata

Naruhiko Kaji

Kunihiro Miyazaki

Yutaka Nakano

Yoshihiro Ishii

Koichi Kosaka

Takeshi Murakami

Takayuki Saito

Yoshio Sato

Suguru Ozawa

Manabu Toshimitsu

Yumiko Noda

Kenichi Sasaki

Tadao Yamanaka

Keiichi Murakawa

Kazuhide Shimamura

An ozone generator comprises a pair of spaced opposing electrodes, electrically conductive members connecting the pair of electrodes to a high-voltage alternating-current power source to generate an electric discharge between the electrodes, and a dielectric provided between the opposing electrodes. A gas flow passage for allowing flow of a material gas therethrough is defined by the surfaces of the electrodes. At least one of the surfaces of the pair of electrodes has a plurality of parallel grooves. The material gas flows in a space between the plurality of grooves and the dielectric, in a direction transverse to the grooves.

Ozone generator

A gas dissolved water producing apparatus includes a gas dissolving section, a gas channel for guiding a gas into the dissolving section, a first water channel for guiding water into the dissolving section, a gas dissolved water discharge channel, and a second water channel for guiding the water without passing through the dissolving section. The second water channel joins the gas dissolved water discharge channel to control the solution gas dissolved in the gas dissolved water can be controlled to a prescribed level of concentration.

Gas dissolved water producing apparatus and method thereof and ultrasonic cleaning equipment and method thereof

Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices. Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10-20 vol % of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.

Method and apparatus for generating ozone and methods of its use

In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.

Ozonizer

An ozone generating apparatus produces highly pure ozone gas which can be used in a semiconductor manufacturing process. The ozone generating apparatus comprises a high voltage source, an ozone generating cell which generates ozone gas by supplying a material gas while applying a high voltage from the high voltage source, and a passage for delivering the generated ozone gas from the ozone generating cell to a desired location. The passage comprises a material which has a passivation film formed by a passivation treatment in a dry process. The oxide passivation film comprises chromium oxide film, iron oxide film or a composite film of chromium oxide and iron oxide.

Ozone generating apparatus

An improved method of laundering clothes and textiles comprises: providing a washing machine having a tub furnished with a fixed outer shell 11 and an inner cylinder 12 that is provided within the outer shell 11, that is rotatably supported on a horizontal rotating shaft 13 and that has a plurality of orifices in the outer peripheral wall through which a washing solution can pass; putting the clothes and textiles into the inner cylinder 12; charging the outer shell 11 with a washing solution Q having a polyelectrolyte containing detergent dissolved therein; and laundering the clothes and textiles with ozone gas from an ozonizer 21 being introduced from an ozone gas supply port 24a directly into the washing solution Q at a temperature of from about 40.degree. C. to less than 50.degree. C., preferably from about 40.degree. C. to about 45.degree. C. between the outer shell 11 and inner cylinder 12. The method has such a great laundering power that severe soiling of the collar and yellowing can be removed in a regular washing cycle without employing any preliminary or post treatments. In addition, the method can be implemented with existing commercial washing machines with ozone being readily introduced into washing solutions even if no special means is employed to mix them with ozone gas.

Method of laundering clothes and textiles

A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO.sub.2) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.

Discharge reactor

In an electric discharge type ozonizer using highly pure oxygen gas having a purity of not lower than 99.99% as a raw material gas, the pressure of a gas in the discharge space of a discharger is raised to a level higher than atmospheric pressure by at least 1.1 kgf/cm.sup.2, and/or in which a liquid-cooled discharger is used, and the temperature of the cooling liquid is set at a level not lower than 15.degree. C., whereby the ozonizer is capable of stably producing ozone gas at a high ozone concentration without causing lowering of the ozone concentration with time.

The present invention provides a method for deodorizing and refreshing petroleum group solvent used in a dry cleaning apparatus, and a dry cleaning apparatus using such a method, which can maintain the circulating solvent in a fresh condition for a long time, eliminate a bad smell of the solvent, provide highly stable cleaning ability and good cleaning finish, and prevent ignition and explosion of the solvent to ensure safety. In the dry cleaning apparatus, the petroleum group solvent in a solvent storage tank 2 is pumped by a circulating pump 5, is supplied to a cleaning bath 8 through a filter 6 and carbon absorbent 7 and then is returned from the cleaning bath 8to the solvent storage tank 2 through a button trap 3, and an ozone generating device 10 is provided for generating ozone gas and a diffuser 11 for pouring the ozone gas produced by the ozone generating device 10 into the petroleum group solvent as fine bubbles are arranged to be contacted with a bottom surface of the solvent storage tank 2 or the button trap 3.

Method for deodorizing and refreshing for dry cleaning

The present invention provides a method for deodorizing and refreshing petroleum group solvent used in a dry cleaning apparatus, and a dry cleaning apparatus using such a method, which can maintain the circulating solvent in a fresh condition for a long time, eliminate a bad smell of the solvent, provide highly stable cleaning ability and good cleaning finish, and prevent ignition and explosion of the solvent to ensure safety. In the dry cleaning apparatus, the petroleum group solvent in a solvent storage tank 2 is pumped by a circulating pump 5, is supplied to a cleaning bath 8 through a filter 6 and carbon absorbent 7 and then is returned from the cleaning bath 8 to the solvent storage tank 2 through a button trap 3, and an ozone generating device 10 is provided for generating ozone gas and a diffuser 11 for pouring the ozone gas produced by the ozone generating device 10 Into the petroleum group solvent as fine bubbles are arranged to be contacted with a bottom surface of the solvent storage tank 2 or the button trap 3.

Method for deodorizing and refreshing for dry cleaning and dry cleaning

A ceramic hydrodynamic bearing used as a radial or a thrust bearing in a spindle motor for a hard disk driver. The bearing includes a ceramic bearing base having hydrodynamic pressure generating grooves. A sliding surface of the bearing base is irradiated with an energy beam with a high energy density to remove said material, thereby forming hydrodynamic pressure generating groove, and at the same time the grooves are coated with a modification layer that is formed by melting the ceramic material that constitutes said ceramic bearing base with the energy beam and by solidifying said ceramic bearing base.

Growing community of inventors

Kanagawa, Japan

Ryoichi Shinjo