Horiba Stec, Co., Ltd.

Ryoichi Kyoyama

Akihiro Taguchi

A vaporization system without a pressure sensor including: a vaporizer that vaporizes the liquid material; a supply amount controller that controls the supply amount of the liquid material to the vaporizer; a flow rate regulation valve that regulates the flow rate of vaporized gas produced by the vaporizer; a flow rate sensor that measures the flow rate of the vaporized gas; and a valve control part that outputs a drive signal to the flow rate regulation valve to control a valve opening level so that a measured flow rate measured by the flow rate sensor becomes equal to a predetermined set flow rate, is adapted to acquire a drive signal value that is a value indicated by the drive signal; and output a control signal to the supply amount controller on the basis of the drive signal value and control the supply of the liquid material.

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Kyoto, Japan

Ryoichi Kyoyama