Adtec Engineering Co., Ltd.

Ryoichi Ida

Katsumi Momose

Katsuya Sangu

Wataru Nakagawa

Michitomo Koda

The Xray irradiation deviceissues Xrays to board markand projects the image of the board markon the fluorescence screen, the fluorescence faceof which visibly displays the image of the board markthat can be captured by the CCD camera. The CCD cameraimages the board markand the mask markdepicted on the photo maskoverlapping together. The boardand the photo maskare aligned by exposure stageso as to the board markand the mask markcoincide.

Positioning apparatus used in a process for producing multi-layered printed circuit board and method of using the same

A board stage of an aligner that can avoid bending of a printed circuit board to be exposed and accomplish high accurate exposure. In one preferred mode a suction plate having small holes is mounted on a supporting body on which a space bigger than the small holes is provided. The holes are connected to the space and to a vacuum device via an air passage and a bottom passage . The diameter of the suction hole is so less than 0.4 mm not to make at the printed circuit board such bending that causes exposure troubles.

Board-stage for an aligner

A marking apparatus for forming alignment marks, which improves the alignment accuracy of each layer in the production of multi-layered printed circuit boards. An X-ray generator irradiates X-rays at a standard mark in a core board of a board , and projects the image of the standard mark on a fluorescence screen . The image is captured by a visible light CCD camera , thereby the position of the standard mark is detected. Using the detected position of the standard mark as an alignment reference, the apparatus irradiates ultra-violet rays at dry film resist layers via mirrors and , and imprints the marks emerged on photo masks and on the dry film resist layers , respectively.

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Tokyo, Japan

Ryoichi Ida