Sandisk Technologies Inc.

Ryoichi Honma

Hiroyuki Ogawa

Yuki Mizutani

Fumiaki Toyama

Masatoshi Nishikawa

Toru Miwa

Shinsuke Yada

Seiji Shimabukuro

Masanori Terahara

Hiroaki Koketsu

Johann Alsmeier

Tuan Duc Pham

Masanori Tsutsumi

Kiyohiko Sakakibara

Naoki Takeguchi

Jongsun Sel

Kensuke Yamaguchi

Atsushi Suyama

Hiroaki Iuchi

Ryousuke Itou

Shigehiro Fujino

Syo Fukata

Masahide Matsumoto

Jiyin Xu

Chan Park

Naoki Ihata

Tomohiro Oginoe

Yasushi Doda

Hajime Kimura

Frank Yu

Jiao Chen

Akihide Takahashi

A method of manufacturing a semiconductor device includes forming a stack of alternating layers comprising insulating layers and spacer material layers over a substrate, forming a memory opening through the stack, forming a layer stack including a memory material layer, a tunneling dielectric layer, and a first semiconductor material layer in the memory opening, forming a protective layer over the first semiconductor channel layer, physically exposing a semiconductor surface underneath the layer stack by anisotropically etching horizontal portions of the protective layer and the layer stack at a bottom portion of the memory opening, removing a remaining portion of the protective layer selective to the first semiconductor channel layer, and forming a second semiconductor channel layer on the first semiconductor channel layer.

Method of making three-dimensional semiconductor memory device having laterally undulating memory films

A monolithic three-dimensional memory device includes a plurality of memory stack structures arranged in a hexagonal lattice and located over a substrate. The hexagonal lattice structure is defined by hexagons each having a pair of sides that are parallel to a first horizontal direction and perpendicular to a second horizontal direction, the memory stack structures are located at vertices of the hexagonal lattice, and each memory stack structure includes vertically spaced memory elements and a vertical semiconductor channel. Source contact via structures are located at each center of a subset of the hexagons that forms a one-dimensional array that extends along the second horizontal direction, each source contact via structure being electrically shorted to a respective source region over, or within, the substrate.

Honeycomb cell structure three-dimensional non-volatile memory device

A monolithic three dimensional memory device includes a semiconductor substrate having a major surface and a doped well region of a first conductivity type extending substantially parallel to the major surface of the semiconductor substrate, a plurality of NAND memory strings extending substantially perpendicular to the major surface of the semiconductor substrate, and a plurality of substantially pillar-shaped support members extending substantially perpendicular to the major surface of the semiconductor substrate, each support member including an electrically insulating outer material surrounding an electrically conductive core material that extends substantially perpendicular to the major surface of the semiconductor substrate and electrically contacting the doped well region.

Three dimensional memory device having well contact pillar and method of making thereof

A three dimensional memory device includes a memory device region containing a plurality of non-volatile memory devices, a peripheral device region containing active driver circuit devices, and a stepped surface region between the peripheral device region and the memory device region containing a plurality of passive driver circuit devices.

Passive devices for integration with three-dimensional memory devices

An alternating stack of insulating layers and sacrificial material layers is formed over a substrate. After formation of a memory opening, all surfaces of the memory opening are provided as silicon oxide surfaces by formation of at least one silicon oxide portion. A silicon nitride layer is formed in the memory opening. After formation of a memory stack structure, backside recesses can be formed employing the silicon oxide portions as an etch stop. The silicon oxide portions can be subsequently removed employing the silicon nitride layer as an etch stop. Physically exposed portions of the silicon nitride layer can be removed selective to the memory stack structure. Damage to the outer layer of the memory stack structure can be minimized or eliminated by successive use of etch stop structures. Electrically conductive layers can be subsequently formed in the backside recesses.

Blocking oxide in memory opening integration scheme for three-dimensional memory structure

A method of making a monolithic three dimensional NAND string includes forming a select gate layer of a third material over a major surface of a substrate, forming a stack of alternating first material and second material layers over the select gate layer, where the first material, the second material and the third material are different from each other, and etching the stack using a first etch chemistry to form at least one opening in the stack at least to the select gate layer, such that the select gate layer acts as an etch stop layer during the step of etching.

Method of making a monolithic three dimensional NAND string using a select gate etch stop layer

A stepped structure is formed on a stack of an alternating plurality of insulator layers and material layers such that at least two material layers have vertically coincident sidewalls. In one embodiment, the material layers can be electrically conductive layers, and a contact via structure can contact the vertically coincident sidewalls. In another embodiment, a sacrificial spacer can be formed on the vertically coincident sidewalls, and the material layers and the sacrificial spacer can be replaced with a conductive material. A contact via structure can be formed on a set of layers electrically shorted by a vertical conductive material portion that is formed in a volume of the spacer. The contact via structure can provide electrical contact to multiple electrically conductive layers.

Batch contacts for multiple electrically conductive layers

A dielectric liner, a bottom conductive layer, and a stack of alternating layers including insulator layers and spacer material layers are sequentially formed over a substrate. A memory opening extending through the stack can be formed by an anisotropic etch process that employs the bottom conductive layer as an etch stop layer. The memory opening is extended downward by etching through the bottom conductive layer and the dielectric liner, while minimizing an overetch into the substrate. A memory stack structure can be formed in the memory opening. Subsequently, a backside contact trench can be formed through the stack employing the bottom conductive layer as an etch stop layer. The spacer material layers can be removed to form backside recesses, which are filled with a conductive material to form electrically conductive layers. The remaining portion of the bottom conductive layer can be employed as a source select gate electrode.

Metallic etch stop layer in a three-dimensional memory structure

At least one via level dielectric layer and at least one line level dielectric layer are sequentially formed over an array of device structures. Conductive line structures are formed within the at least one line level dielectric layer. A mask layer is applied over the conductive line structures, and is lithographically patterned to form opening therein. Portions of the conductive line structures are removed from underneath the openings in the patterned mask layer to form via cavities. The via cavities are vertically extended through the at least one via level dielectric layer employing a combination of the mask layer and the at least one line level dielectric layer as an etch mask. At least one conductive material can be deposited in the via cavities to form conductive via structures, which, in conjunction with the conductive line structures, constitute integrated line and via structures.

Self-aligned integrated line and via structure for a three-dimensional semiconductor device

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Yokkaichi, Japan

Ryoichi Honma