Sumitomo Precision Products Co., Ltd.

Ryohei Uchino

Naoki Okimoto

Takafumi Moriguchi

Osamu Torayashiki

Mario Kiuchi

Takashi Ikeda

Gen Matsuoka

Tokiko Misaki

Tomonori Mori

Akio Mugishima

A vibrating-type gyroscope element includes a fixed part, a resonator having a vibration mode of cos Nθ (N is a natural number of two or more), support parts, and electrodes. The electrodes are arranged in 4N orientations arranged in an outer circumferential direction of the resonator. The electrodes include at least one primary driving electrode and at least one secondary pickoff electrode. A relationship U≥1 or (S1+S2)−2≥|S1−S2| is satisfied, where S1 is the number of cases where a secondary pickoff electrode is clockwise adjacent to a primary driving electrode, S2 is the number of cases where a secondary pickoff electrode is anticlockwise adjacent to a primary driving electrode, and U is the number of the secondary pickoff electrodes being neither clockwise nor anticlockwise adjacent to a primary driving electrode.

Vibrating-type gyroscope element and angular velocity sensor including same

A vibrating-type gyroscope element includes a fixed part, a resonator having a cos Nθ (N is a natural number of two or more) mode of vibration, support parts, and electrodes. The electrodes are arranged in 4N orientations arranged in an outer circumferential direction of the resonator. The electrodes include a primary driving electrode, a primary pickoff electrode, a secondary pickoff electrode, and a secondary driving electrode. The primary pickoff electrode is arranged in the same orientation as that of the primary driving electrode, and the secondary driving electrode is arranged in the same orientation as that of the secondary pickoff electrode.

Vibrating-type gyroscope element and angular velocity sensor comprising same

An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sandwiched between an annular first region and an annular second region on an inner side of the first region in the base material over substantially an entire circumference of the resonator.

Angular rate sensor

A MEMS element includes a substrate, a fixing portion provided at the substrate, first and second actuators provided at the fixing portion, a drive target member coupled to the first and second actuators, a third actuator provided at the fixing portion, and a restriction member coupled to the third actuator. The first and second actuators drive the drive target member in a direction parallel to or crossing an upper surface of the substrate. The third actuator drives the restriction member in a direction crossing a movement direction of the drive target member to position the restriction member within a movement plane of the drive target member such that the restriction member restricts displacement of the drive target member.

MEMS element and optical apparatus using the same

A displacement increasing mechanism has a fixing portion, first and second actuators coupled to the fixing portion, a first beam having first and second end portions and coupled to the first actuator at the first end portion, a second beam having third and fourth end portions and coupled to the second actuator at the third end portion, and a drive target member coupled to a parallel arrangement portion at which the first and second beams are arranged in parallel with each other. The first actuator is driven to pull the first beam from a second end portion side in the direction of extending the first beam, and the second actuator is driven to push the second beam form a fourth end portion side in the direction of extending the second beam.

Displacement increasing mechanism and shutter device

A mirror device includes a frame body, a mirror configured to tilt about a Y-axis with respect to the frame body, a fixed inner comb electrode including a plurality of electrode fingers arranged in the arrangement direction along the Y-axis and provided at the frame body, and a movable inner comb electrode including a plurality of electrode fingers arranged in the arrangement direction and provided at the mirror, the electrodes fingers of the fixed inner comb electrode and the movable inner comb electrode being alternately arranged. The mirror includes a mirror body and an extension extending from the mirror body. Some of the electrode fingers of the movable inner comb electrode are provided at the mirror body, and another electrode fingers of the movable inner comb electrode are provided at the extension.

Semiconductor device

A mirror devicedisclosed herein includes a base, a mirror, an actuator, a fixed comb electrode, and a movable comb electrode. The movable comb electrodeincludes: a beam portion; a hingeconfigured to couple the beam portionto the actuatorand having lower rigidity than the beam portion; a hingeconfigured to couple the beam portionto the baseand having lower rigidity than the beam portion; and electrode fingers, . . . provided for the beam portionand facing electrode fingers, . . . of the fixed comb electrode. The movable comb electrodeis configured to tilt around a tilt axis Bthat passes through the hinge

Drive apparatus

A mirror device includes a mirror, an actuator tilting the mirror, a first hinge coupling the mirror to the actuator, a base, a second hinge coupling the mirror to the base, a movable comb electrode coupled to the mirror, and a fixed comb electrode fixed to the base. The actuator is controlled based on a capacitance between the movable comb electrode and the fixed comb electrode. The movable comb electrode is disposed on a portion of the mirror closer to the second hinge than to the first hinge.

Growing community of inventors

Hyogo, Japan

Ryohei Uchino