Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,317 patents)
1 patent:
1. 11282719 - Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition