Oregon State University

Ryan Helmut Mansergh

Douglas A Keszler

Cory K Perkins

Juan Carlos Ramos

Disclosed herein are embodiments of a porous aluminum oxide thin film having a surface RMS roughness value of less than 1 nm. The thin film may also comprise phosphorus. The disclosed thin films may have a refractive index of from 1 to 2, such as from 1 to 1.5. Also disclosed are embodiments of as method for making the disclosed thin films, comprising forming an aqueous solution of the alumina precursor, a surfactant and optionally a phosphorus-containing precursor, and depositing the solution on a substrate.

Growing community of inventors

Corvallis, OR, United States of America

Ryan Helmut Mansergh