Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Chuangshi Industry Group Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Ruzhan Lu

Gang Wang

Yong You

Litao Fan

Yunguang Pan

Jie Jiang

Jue Wang

Weiwang Sun

Songli Hu

Jiyuan Mou

Qihang You

Mingsong Lu

Tian Liu

Chunxia Huang

Fangfang Zhu

Honghong Su

Yajian Wu

An airbag cushion assembly includes an airbag cushion and an inflation-deflation apparatus that communicates with the airbag cushion. The airbag cushion includes a plurality of sub-airbags, and an airbag gap is formed between adjacent sub-airbags. The inflation-deflation apparatus is provided with an exhaust port, the exhaust port is provided in the airbag gap, and the inflation-deflation apparatus is configured to inflate and deflate the airbag cushion. For the airbag cushion assembly, the exhaust port is provided in the airbag gap, air exhausted by the airbag cushion takes away damp air accumulated between a patient and the airbag cushion, to reduce humidity of the contact area between the patient and the airbag cushion, thereby achieving a pressure sore prevention effect.

Airbag cushion assembly, intelligent pressure sore prevention cushion, and monitoring system

A wafer pre-alignment device is disclosed, including a first unit configured to drive a wafer to rotate or move upward or downward, a second unit configured to drive the wafer to translate, and a position detector including a light source, a lens and an image sensor. A light beam from the light source passes through the wafer and the lens and thereby provides information indicating a position of the wafer to the image sensor. The first unit and the second unit are able to adjust the position of the wafer based on the information obtained by the image sensor. A method for pre-aligning a TSV wafer is also disclosed.

Silicon wafer pre-alignment device and method therefor

Growing community of inventors

Shanghai, China

Ruzhan Lu