Micron Technology Incorporated

Other

Russell Nielsen

Luan C Tran

John K Lee

Eric Higgins Freeman

Zengtao “Tony” Liu

Zengtao T Liu

John Lee

A method for defining patterns in an integrated circuit comprises defining a plurality of features in a first photoresist layer using photolithography over a first region of a substrate. The method further comprises using pitch multiplication to produce at least two features in a lower masking layer for each feature in the photoresist layer. The features in the lower masking layer include looped ends. The method further comprises covering with a second photoresist layer a second region of the substrate including the looped ends in the lower masking layer. The method further comprises etching a pattern of trenches in the substrate through the features in the lower masking layer without etching in the second region. The trenches have a trench width.

Integrated circuit fabrication

Growing community of inventors

Boise, ID, United States of America

Russell Nielsen