Radiation Watch Limited

Russell Morgan

David Jeremy Prendergast

Michael John Anderson

A high-energy radiation detector apparatus, comprising a high-energy radiation detector substrate and a plurality of charge collection electrodes operatively coupled to first and second opposing sides of the detector substrate is disclosed. Charge collection circuitry is associated with the plurality of charge collection electrodes for collecting charge induced on the charge collection electrodes by a high energy radiation photon interaction event caused by high-energy radiation incident on the detector substrate.

Apparatus and method for detecting high-engery radiation

A method for anisotropically plasma etching a semiconductor wafer is disclosed. The method comprises supporting a wafer in an environment operative to form a plasma, such as a plasma reactor, and providing an etching mixture to the environment. The etching mixture comprises at least one etch component, at least one passivation component, and at least one passivation material removal component.

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East Cowes, United Kingdom

Russell Morgan