Moxtek, Inc.

Rumyana Petrova

Dean E Probst

Bin Wang

Ted Wangensteen

Mike Black

Steven Marks

R Stewart Nielson

Mark Alan Davis

Michael Black

Each wireof a wire grid polarizer can include a capon a reflective rib. The cap, with dimensions and material as specified herein, can protect the reflective ribfrom corrosion and can improve performance of the wire grid polarizer. The capcan be located on the distal endand the pair of sidewallsof the reflective rib. Capchemistry can include CO, C═O, COO, aluminum fluoride, and aluminum oxide. Each capcan have a maximum thickness Thon the sidewallof the reflective ribin an upper 50% (above plane) of the wirefarthest from the substrate. Each capcan have a maximum thickness Thon the sidewallthat is greater than a maximum thickness Thof the capon the distal end.

Wire grid polarizer with protective cap

Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.

Polarizer with wire pair over rib

A wire grid polarizer comprising an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires (or top ribs), each oriented laterally with respect to one another. There can be a first gap disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap. Also included are methods of making wire grid polarizers.

Polarizer with variable inter-wire distance

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Pleasant Grove, UT, United States of America

Rumyana Petrova