University of California

Ruisheng Chang

Mark Bachman

Guann-Pyng Li

Yang Zhang

Minfeng Wang

Sungjun Kim

Micro capacitive switches and methods of manufacturing micro capacitive switches at variable nominal capacitance value using micro-structures on the contact plates of the same dimension. In a preferred embodiment, a separately manufactured contact plate can be mounted to a movable magnet in order to be actuated to 'on' and 'off' state of the capacitive switch. Depending on the contact plate's surface condition, variable contact capacitance at &#x201c;on&#x201d; state can be precisely specified by geometrical properties of the micro-structures on the surface, such as the density, size and depth.

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Irvine, CA, United States of America

Ruisheng Chang