Beijing Rslaser Opto-electronics Technology Co., Ltd.

Beijing Rslaser Opto-electroncis Technology Co., Ltd.

Rui Jiang

Hua Zhang

Xiaoquan Han

Guangyi Liu

Jiangshan Zhao

Pengfei Sha

Qingqing Yin

Qin Qiong Zhang

Xiang Wang

Xinyue Hu

Zebin Feng

Junhong Yang

Mi Liao

Provided are a device () and a method for online measuring a spectrum for a laser device. The device () for online measuring a spectrum for a laser device includes: a first optical path assembly (G) and a second optical path assembly (G), and the second optical path assembly (G) and the first optical path assembly (G) constitute a measurement optical path. The second optical path assembly (G) includes: an FP etalon () and a grating (). The homogenized laser beam passes through the FP etalon () to generate an interference fringe. The grating () is arranged after the FP etalon (), or is arranged before the FP etalon () in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon ().

Device and method for online measuring spectrum for laser device

A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z−1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.

Control method and system for stabilizing excimer laser pulse energy

According to the present disclosure, there is provided a device () and a method for measuring a wavelength for a laser device. The device () for measuring a wavelength for a laser device includes: a first optical path assembly and a second optical path assembly. The first optical path assembly and the second optical path assembly constitute a laser wavelength measurement optical path. The second optical path assembly includes: an FP etalon assembly () and an optical classifier (). The homogenized laser beam passes through the FP etalon assembly () to generate an interference fringe. The optical classifier () is arranged after the FP etalon assembly () in the laser wavelength measurement optical path, and configured to deflect the laser beam passing through the FP etalon assembly ().

Device and method for measuring wavelength for laser device

Growing community of inventors

Beijing, China

Rui Jiang