Brooks Automation Gmbh

Tec-sem Ag

Rudy Federici

Jakob Blattner

William John Fosnight

Clint Harris

Clint Haris

A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

Reticle manipulation device

A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.

Reticle manipulating device

To make possible a tightly packed, essentially horizontal storage of wafers (), in which a simplified access to each of these wafers () is possible, a device is provided having a plurality of superimposed storage elements (). The storage elements () have device features () for depositing the wafers (). The storage elements () have projections () for lifting, whereby a specific storage element () as well as all storage elements () arranged above this specific storage element () can be lifted by a predetermined first height for producing a contact gap. The projections () can also be used to lift the storage element () arranged below the said storage element () by a predetermined second height for producing a freedom of access.

Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components

A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

Manipulating device for photomasks that provides possibilities for cleaning and inspection of photomasks

A cleaning device for use in the production of semiconductor components comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned so that different faces of the object are simultaneously cleaned. At least two gas feeding devices, having one means each for directing a gas flow onto the surface of the object to be cleaned, open into a cleaning chamber supplying a pressurized cleaning gas. At least two extraction means are connected to the outside of the cleaning chamber for discharging the gas fed to the cleaning chamber. The object can be introduced into the cleaning chamber through at least one gap. At least two ionization means are used to ionize the gas and the particles that are present in the cleaning chamber. One ionization means each is mounted between a direction means and an extraction means.

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Berg, Switzerland

Rudy Federici