Balzers Patent Und Beteiligungs Ag

Rudolf Fluckiger

Gerhard Rettinghaus

The mass spectrometer is of the type having a mass-spectrometric separation system located in an evacuable chamber, an inlet to the chamber for the gases to be examined, and an ion source and a detector for the gas mixture constituting auxiliary devices in the chamber and having walls. The gas inlet and the auxiliary devices are arranged in series, with the gas inlet being formed as an inlet nozzle operable to form a jet of the gas to be examined and so designed, relative to the auxiliary devices, as to direct the jet, as a molecular beam, through one auxiliary device without contacting a wall thereof so that the jet enters directly into the other auxiliary device. The ion source is arranged between the detector and the nozzle, and may be designed as a hot-cathode ion source. The detector may be designed as a hot-cathode ionization detector or as an ion source of a second mass-spectroscopic separation arrangement. The detector may also be designed as an oscillator-crystal measuring device for measuring constituents of the gas deposited by condensation on one surface of the oscillator crystal. The mass-spectroscopic separation device may be designed as a quadrupole mass spectrometer.

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Rudolf Fluckiger