Inficon Gmbh

Leybold Vakuum Gmbh

Rudolf Flosbach

Rudi Widt

Markus Nothhelfer

Joachim Klein

The invention relates to a film leak detector with two films ( ) each stretched in a frame ( ); in order to attain a simple and stable structuring, it is proposed that each of the frames ( ) is comprised of two synthetic material subframes between which the particular film ( ) is fastened.

Film leak detector

A test leak unit ( ) includes a supply of test gas, preferably helium, and an element ( ) for determining leakage rates. The aim of the invention is to create a simple, robust and easily refilled test leak unit, especially for detecting packaging leaks. To this end, the test gas supply is stored under substantially atmospheric pressure in a resealable reservoir ( ) including a closing part ( ), such that when the reservoir ( ) is closed, a test gas-impermeable seal is developed between the closing part ( ) and the reservoir ( ), and the leakage rate-determining element ( ) forms part of the closing part ( ).

Test leak unit

A method for operating a film leak detector ( ) which includes two films ( ) each stretched in a frame ( ), which, with a test sample ( ) emplaced, delimit a test chamber ( ). The detector is equipped with two vacuum pumps ( ), in which first the test chamber ( ) is evacuated and, after the evacuation operation, a leak detection operation takes place. In order to avoid test gas pollution and impurities during the first phase of the evacuation of the test chamber ( ), only one ( ) of the two vacuum pumps is operated and during the leak detection operation only the second vacuum pump ( ) is operated.

Method for operating a film leak detector and film leak detector suitable for carrying out this method

The invention relates to a test gas leakage detection apparatus ( ) comprising a test chamber ( ) and supply and measuring devices such as fore-pumps and high-vacuum pumps, test gas detectors, electronic components, etc. In order to construct an apparatus of this type in a manner which is simple and which does not restrict mobility, the invention provides that the test chamber ( ) and the supply and measuring devices are combined to form a modular unit, and that the test chamber ( ) is supported on a housing ( ) in which the supply and measuring devices are accommodated. In addition, air cooling devices are assigned to thermally critical components of the supply and measuring devices.

Test gas leakage detection apparatus

A helium supply unit (1) supplies helium from a high pressure storage (21) to fill a test chamber (6) which encloses a sample holder (5) to be examined for leaks by measuring device (2) including a mass spectrometer (3) and a control unit (4). The test gas is recovered after the testing by a pressure difference between a low pressure storage (18) and the test chamber (6). The test chamber is evacuated prior to receipt of the test gas by a vacuum pump (27) and after testing by a vacuum pump (34) for more complete helium recovery. The recovered test gas is then transmitted back to the high pressure storage (21) through a compressor (19), which raises the pressure of the recovered gas to a predetermined pressure, from the low pressure storage (18). The control unit (4) also controls a pure test gas supply (37) and a release valve (44). The concentration of the recovered test gas is measured and, if the concentration is too low, the control unit (4) releases the recovered test gas through valve (44) and admits fresh test gas from the supply (37) into the helium supply unit (1) at a point between the low pressure storage (18) and the compressor (19). In this manner, expensive test gases, such as helium, are recovered and reused.

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Wipperfurth, Germany

Rudolf Flosbach