Asml Netherlands B.v.

Ruben Etienne Johan Rinus Vandervelden

Hans Butler

Bas Jansen

Samer Abdelmoeti Abuzeid Abdelmoeti

Aditya Singh

Koen Johan Frederik Loonen

The invention relates to an object positioning system including an actuator system and a measurement system. The actuator system includes an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field includes a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of the actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system includes a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.

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Oostham, Belgium

Ruben Etienne Johan Rinus Vandervelden