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Ru Bai

Zhenghong Qian

A three-axis magnetic sensor apparatus is described that is processed together into a single chip, with high performance, low cost, as well as small size. The three-axis magnetic sensor apparatus include a substrate, a two-axis magnetic sensing structure and a single-axis sensing structure. The two-axis sensing magnetic structure consisting of two shielded Wheatstone bridge configurations in conjunction with an annular or semi annular magnetic flux-guiding structure, and the single-axis sensing structure consisting of a push-pull Wheatstone bridge in conjunction with a flux guide that is capable of generating a fringe field whose horizontal component is proportional to the vertical component of an external magnetic field. The two-axis magnetic sensing structure and the single-axis structure are processed together into a single chip, and can be used to measure respectively X, Y and Z components of external magnetic fields.

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Zhejiang, China

Ru Bai