Other

Roy Trevor Blunt

Rajesh Odedra

Andrew R Nelson

Graham Williams

Megan Ravetz

Howard Williams

A method and apparatus for the bulk delivery of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler ( ) to a plurality of reactor sites ( ) wherein a carrier gas ( ) is introduced into the container ( ) of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively distributed to one or more of a plurality of reactor sites ( ). The gaseous mixture may be stored in a reservoir ( ) and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required.

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Cwmbran, United Kingdom

Roy Trevor Blunt