Trumpf Photonic Components Gmbh

Roy Ovink

Petrus Theodorus Jutte

Johannes Hendrikus Maria Spruit

Alexander Marc Van Der Lee

Joachim Wilhelm Hellmig

Holger Joachim Moench

Ralph Engelbertus Theodorus Gudde

A laser sensor module for detecting a particle density of small particles with a particle size between 0.05 &#x3bc;m and 10 &#x3bc;m includes a first laser configured to emit a first measurement beam, a second laser configured to emit a second measurement beam, and an optical arrangement configured to focus the first measurement beam to a first measurement volume and to focus the second measurement beam to a second measurement volume. The optical arrangement includes a first numerical aperture and a second numerical aperture arranged to detect a predetermined minimum particle size. The laser sensor module further includes a first detector configured to determine a first self-mixing interference signal of a first optical wave, a second detector configured to determine a second self-mixing interference signal of a second optical wave, and an evaluator.

Optical particle sensor module

A laser sensor for detecting a particle density includes: a laser configured to emit a measurement beam, an optical arrangement being arranged to focus the measurement beam to a measurement volume, the optical arrangement having a numerical aperture with respect to the measurement beam, a detector configured to determine a self-mixing interference signal of a optical wave within a laser cavity of the laser, and an evaluator. The evaluator is configured to: receive detection signals generated by the detector in reaction to the determined self-mixing interference signal, determine an average transition time of particles passing the measurement volume in a predetermined time period based on a duration of the self-mixing interference signals generated by the particles, determine a number of particles based on the self-mixing interference signals in the predetermined time period, and determine the particle density based on the average transition time and the number of particles.

Laser sensor module for particle density detection

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Eindhoven, Netherlands

Roy Ovink