Mks Instruments, Inc.

Hps, Inc.

Roy N Peacock

Neil T Peacock

Lee E Vestman

A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at at least the cathode of the gauge where the energy of the light is sufficient to release photoelectrons from the cathode to thus initiate the discharge. A member is also provided for removably positioning the glow lamp within the vacuum space whereby the lamp can be removed during bake out and then subsequent thereto, be inserted within the vacuum space to thus enhance longevity of the lamp.

Removable discharge initiating means for cold cathode discharge

A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at least at the cathode of the gauge where the energy of the light is sufficient to release photoelectrons from the cathode to thus initiate the discharge. Various techniques for supplying power to the lamp are also disclosed.

Discharge initiating means for cold cathode discharge ionization gauge

A vacuum processing system and method by which system turbulence is reduced utilizing a vacuum responsive flow controlling valve that is located between a vacuum pump and a vacuum processing chamber to restrict the rate of pumpdown. A valve member of the flow controlling valve, such as a butterfly valve closure plate, is positionally shifted by a pressure differential responsive actuator as a function of the extent to which the pressure in the vacuum processing chamber has been reduced by the pump. During the initial phase of pumpdown, the valve closure member is in its maximally closed position, with evacuation of the vacuum processing chamber occurring solely through a leakage path past the valve member. After a predetermined pressure is reached, the valve member slowly opens as the pressure differential in the actuator increases, until a maximally open position is achieved.

Vacuum processing system and method

A method and circuit for measuring the pressure of a gas with a cold cathode ionization gauge by measuring the electrical resistance or conductance of the gauge to thus extend the measurement range of the gauge. Current into the gauge may be limited to a substantially constant value at pressures greater than about 10.sup.-6 Torr, for example, so that the gauge voltage varies monotonically with respect to pressure at pressures greater than 10.sup.-6 Torr.

Method and circuit for extending the range of a cold cathode discharge

A toggle clamp having first and second clamping members pivotally connected together for receiving objects to be clamped therebetween; a handle pivotally mounted with respect to one of the clamping members; a bail including a force generating member where the bail is so mounted with respect to the handle that upon movement of the handle from a first position to a second position, the force generating member is moved to a first position to generate a force for clamping the objects together with a first clamping force; and, a member, upon weakening or failure of the force generating means, which permits movement of the force generating member to a second position where the objects remain clamped together with a force less than that of the first clamping force whereby a fail-safe operation is provided.

Toggle clamp

A gate valve is disclosed having a casing with inlet and outlet apertures one of which has a valve seat. An actuator reciprocal transversely of the apertures is provided having two oppositely disposed faces. At least one plate member which serves as a valve head flanks at least one of the faces for cooperation with said valve seat. Cylindrical rotative means having a rectangular cross-section are positioned between the actuator member and the plate member for moving the plate member from an open to a closed/latched position as the actuator member is moved.

Gate stop valve

A gate valve is disclosed having a casing with inlet and outlet apertures one of which has a valve seat. An actuator reciprocal transversely of the apertures is provided having two oppositely disposed faces. At least one plate member which serves as a valve head flanks at least one of the faces for cooperation with said valve seat. And rectangular-shaped rotative means are positioned between the actuator member and the plate member for moving the plate member from an open to a closed/latched position as the actuator member is moved.

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Lafayette, CO, United States of America

Roy N Peacock