Semiconductor Systems, Inc.

Verbatim Corporation

Memorex Corporation

Geri Engineering, Inc.

Roy E Hurtig

Stanley I Rojo

Michael L Parodi

Bert R Larson

Don W Geri

Steven D Smith

An apparatus and method are provided for efficiently and effectively coating a substantially flat surface, i.e., a substrate, with a high-viscosity liquid chemical, such as photoresist. The flat surface is oscillated by rotating the surface in one direction and then repeatedly reversing the direction of rotation of the surface. The chemical is spread by both the centrifugal force of the rotation of the surface and the tangential force of the angular acceleration of the surface. The tangential force helps spread the chemical without prematurely overcoming the surface tension of the chemical resulting in a particularly effective coating using substantially less chemical. Chemical is alternatively spread by vibrating the flat surface. Vibrating applies to the chemical, in addition to radial, centrifugal force, if any, non-radial forces which are not directly opposed by surface tension. The chemical is therefore spread more evenly and efficiently without overcoming the surface tension of the chemical. Vibrating is accomplished either (i) by oscillating the surface with a low amplitude and a high frequency or (ii) by quickly moving the surface in a small, circular motion.

Oscillatory chuck method and apparatus for coating flat substrates

An improved nozzle assembly for dispensing liquid is disclosed. In a first embodiment of the invention, the liquid dispenser comprises a nozzle assembly with an expansive cavity at its dispensing end. When the flow of liquid in the dispenser is halted, a pocket of liquid formed inside the cavity ties the liquid in the nozzle to the liquid in a drop formed at the tip of the nozzle. Thus, when 'suck-back' is applied, the drop is pulled into the cavity and up the nozzle, leaving at most a very small and stable amount of liquid inside the cavity. In a second embodiment of the invention, an inner nozzle tube extends beyond the end of an outer nozzle tube, creating an external annular recess which captures and holds a drop of liquid over the end of the nozzle. After suck-back, the drop is pulled up into the nozzle, leaving a small, stable amount of liquid in the annular recess.

Nozzle assembly for dispensing liquid

A photoresist drainage system for conducting the excess photoresist and solvents from a spin coating machine in a semiconductor fabrication unit is disclosed. The excess photoresist liquid and solvents are channeled directly to an exhaust manifold instead of being collected in a temporary storage tank. From the exhaust manifold the photoresist and solvents flow directly into a factory chemical reclaim system. This substantially reduces the amount of solvent vapors that are drawn into the factory exhaust system.

Drain arrangement for photoresist coating apparatus

An automatic inflation system for use as an emergency locating system which is activated by the severance of an initiator wire which in turn begins the operation of a transmitter and a timer. Following a period of time as determined by the timer, a pair of electrically activated pyrotechnic thrusters are actuated and cause the rupture of seals on a pair of compressed gas storage cylinders which in turn results in the inflation of two sections of a twin mast, raising a radio antenna and radar reflective material. A radio transmitter is also activated at the start of the time delay with an emergency locating signal broadcast from the antenna, after the mast is raised. This system provides improved means of locating missing equipment when searched for by radio search, radar search, and/or visual search.

Automatic inflation system

An improved tape cartridge with length dimension significantly greater than prior art cartridges of similar application, tape packs and drive belt being disposed to permit tape packs of greatly increased tape capacity and thereby a multifold increase in total cartridge capacity, and the front face being compatible for interfacing with most commercially available cartridge tape drives.

Tape cartridge with increased tape capacity

An improved tape cartridge having two tape packs mounted for rotation in a housing; an endless elastic belt mounted about a first and second roller to engage the tape packs on their periphery; said first roller rotatable about a stationary axis; said second roller being a floating belt-guide roller urged by the tension of the belt against the two tape packs with the belt squeezed between each pack and said first roller, said floating belt-guide roller having a draft on the outer surface to form a frusto-conical shape; means for driving said belt whereby as said belt is driven the belt tends to climb to the high side of the floating roller urging the central hub of the floating belt-guide roller to point contact with the base plate of the housing.

Tape cartridge

A device and method are disclosed for testing the abrasion quality of a magnetic recording member to cause recording head wear. A magnetic recording member to be tested is moved past a dummy recording head, the smoothness of which has been determined before the head is contacted with the magnetic recording surface. After a predetermined contact between the dummy head and the tape, the smoothness of the head is again determined which is a direct function of the abrasion characteristics of the tape. The smoothness of the dummy head is determined by means of a non-contact photonic sensor which converts reflective light from the surface of the head into a specific voltage output.

Growing community of inventors

Saratoga, CA, United States of America

Roy E Hurtig