Tosoh Smd, Inc.

Roy A Calligaro

Martin L Blazic

A cathode sputtering mechanism is disclosed having a target nest and a target located within the target nest. The target nest includes a threaded internal peripheral surface which is complementary to external threads on the outer peripheral surface of the target. The target also includes a central opening having a tapered upwardly facing surface having apertures extending vertically into the tapered surface. A removal wrench includes a cylindrical ring having at its lower end a tapered surface which matches the tapered surface on the target. The wrench also includes torque pins extending into the tapered surface of the cylindrical ring which are disposed in complementary spacial relationship with the apertures in the target.

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Richardson, TX, United States of America

Roy A Calligaro