Freescale Semiconductor,inc.

Nxp Usa, Inc.

Freescale Semiconductors Inc.

Rouying Zhan

Chai Ean Gill

Amaury Gendron

Changsoo Hong

Patrice Besse

James D Whitfield

Michael H Kaneshiro

Jean-Philippe Laine

Alain Salles

Wen-Yi Chen

Abhijat Goyal

William G Cowden

Vadim A Kushner

Jiang-kai Zuo

Ronghua Zhu

Evgueniy Nikolov Stefanov

Jean Philippe Laine

Hongzhong Xu

Chai Ean E Gill

Jean-Phillippe Laine

A single-stage voltage clamp device with high holding voltage characteristics (e.g., &#x2dc;40V) includes two p-n-p structures coupled in series via an n-p-n structure. The device has a low-voltage terminal that may be coupled to the ground of a circuit and high voltage terminal that may be coupled to a voltage source of the circuit. A highly doped floating (n+)/(p+) junction region within a heavily doped base of the low-voltage-side p-n-p structure allows for holding voltages of at least 40V in the single-stage device without the need to employ two such devices in series to achieve the desired holding voltage.

Single-stack bipolar-based ESD protection device

An ESD protection device for protecting an integrated circuit against an ESD event includes a first terminal coupled to an input/output pad of the IC, a second terminal coupled to a reference or ground voltage, a silicon-controlled rectifier device having an anode connected to the first terminal and a cathode connected to the reference or ground voltage, and a pnp transistor coupled in parallel with the SCR device. The pnp transistor has an emitter coupled to the first terminal, a collector coupled to the second terminal, and a base coupled to a gate of the SCR. The pnp transistor includes a contact region formed at a first side of a substrate, the first contact region being surrounded by an STI layer formed at the first side of the substrate. An insulation structure is formed at an intersection of the first contact region and the STI layer.

ESD protection device, semiconductor device that includes an ESD protection device, and method of manufacturing same

An electrostatic discharge (ESD) protection device includes a first bi-directional silicon controlled rectifier having a doped well of a first conductivity type, a buried doped layer having a second conductivity type opposite the first conductivity type, first and second highly doped regions of the second conductivity type in the doped well, and a third highly doped region of the first conductivity type in the doped well. The first, second and third highly doped regions are connected to a first node. A first transistor in the doped well includes an emitter coupled to the first highly doped region, a collector coupled to a conductive line in the buried doped layer, and a base coupled to the third highly doped region. A second transistor in the doped well includes an emitter coupled to the second highly doped region, a collector coupled to the conductive line in the buried doped layer, and a base coupled to the third highly doped region.

Electrostatic discharge protection circuit with a bi-directional silicon controlled rectifier (SCR)

An electrostatic discharge protection clamp includes a substrate and a first electrostatic discharge protection device over the substrate. The first electrostatic discharge protection device includes a buried layer over the substrate. The buried layer has a first region having a first doping concentration and a second region having a second doping concentration. The first doping concentration is greater than the second doping concentration. The first electrostatic discharge protection device includes a first transistor over the buried layer. The first transistor has an emitter coupled to a first cathode terminal of the electrostatic discharge protection clamp. The first electrostatic discharge protection device includes a second transistor over the buried layer. The second transistor has an emitter coupled to a first anode terminal of the electrostatic discharge protection clamp. A collector of the first transistor and a collector of the second transistor are over the first region of the buried layer.

ESD protection device with buried layer having variable doping concentrations

The present disclosure teaches a Field-Effect Transistor (FET) configured as a diode to provide ESD protection. The field-effect transistor has its gate, source, and body connected to a common power supply rail. A low-density doped drain region extends in a length direction beyond the gate sidewall spacers of the transistor to provide a lower leakage current than would otherwise be exhibited by the protection device.

Electro-static discharge protection device and method of making

An electrostatic discharge protection device includes a buried layer having a plurality of heavily doped regions of a first conductivity type and a laterally diffused region between adjacent heavily doped regions, a semiconductor region over the buried layer, and a first well of the first conductivity type extending from a surface of the semiconductor region to a heavily doped region. The device includes a first transistor in the semiconductor region having an emitter coupled to the first terminal, and a second transistor in the semiconductor region having an emitter coupled to the second terminal. The first well forms a collector of the first transistor and a collector of the second transistor.

ESD protection device

An ESD protection structure formed within a semiconductor substrate of an integrated circuit device. The ESD protection structure comprises a thyristor structure being formed from a first P-doped section forming an anode of the thyristor structure, a first N-doped section forming a collector node of the thyristor structure, a second P-doped section, and a second N-doped section forming a cathode of the thyristor structure. A low-resistance coupling is provided between an upper surface region of the collector node of the thyristor structure and the anode of the thyristor structure.

ESD protection structure

An electrostatic protection includes a buried layer having an outer region and an inner region which are heavily doped regions of a first conductivity type. The inner region is surrounded by an undoped or lightly doped ring region. The ring region is surrounded by the outer region. The device further includes a semiconductor region over the buried layer, a first well of the first conductivity type in the semiconductor region, a first transistor in the semiconductor region, and a second transistor in the semiconductor region. The first well forms a collector of the first transistor and a collector of the second transistor.

Electrostatic discharge (ESD) protection devices and methods. The ESD protection devices include a semiconductor substrate, a buried semiconducting layer, and an overlying semiconducting layer. The ESD protection devices also include a first bipolar device that includes a first bipolar device region, a first device base region, and a first device emitter region. The ESD protection devices also include a second bipolar device that includes a second bipolar device region, a second device well, a second device base region, and a second device emitter region. The ESD protection devices further include a sinker well that electrically separates the first bipolar device from the second bipolar device. The ESD protection devices are configured to transition from an off state to an on state responsive to receipt of greater than a threshold ESD voltage by the first device base region. The methods include methods of forming the ESD protection device.

Electrostatic discharge protection devices and methods of forming the same

An ESD protection device is fabricated in a semiconductor substrate that includes a semiconductor layer having a first conductivity type. A first well implantation procedure implants dopant of a second conductivity type in the semiconductor layer to form inner and outer sinker regions. The inner sinker region is configured to establish a common collector region of first and second bipolar transistor devices. A second well implantation procedure implants dopant of the first conductivity type in the semiconductor layer to form respective base regions of the first and second bipolar transistor devices. Conduction of the first bipolar transistor device is triggered by breakdown between the inner sinker region and the base region of the first bipolar transistor device. Conduction of the second bipolar transistor device is triggered by breakdown between the outer sinker region and the base region of the second bipolar transistor device.

ESD protection with asymmetrical bipolar-based device

An electrostatic discharge (ESD) protection device includes a semiconductor substrate, a base region in the semiconductor substrate and having a first conductivity type, an emitter region in the base region and having a second conductivity type, a collector region in the semiconductor substrate, spaced from the base region, and having the second conductivity type, a breakdown trigger region having the second conductivity type, disposed laterally between the base region and the collector region to define a junction across which breakdown occurs to trigger the ESD protection device to shunt ESD discharge current, and a gate structure supported by the semiconductor substrate over the breakdown trigger region and electrically tied to the base region and the emitter region. The lateral width of the breakdown trigger region is configured to establish a voltage level at which the breakdown occurs.

ESD protection with integrated LDMOS triggering junction

Protection device structures and related fabrication methods are provided. An exemplary semiconductor protection device includes a first base region of semiconductor material having a first conductivity type, a second base region of semiconductor material having the first conductivity type and a dopant concentration that is less than the first base region, a third base region of semiconductor material having the first conductivity type and a dopant concentration that is greater than the second base region, an emitter region of semiconductor material having a second conductivity type opposite the first conductivity type within the first base region, and a collector region of semiconductor material having the second conductivity type. At least a portion of the second base region resides between the third base region and the first base region and at least a portion of the first base region resides between the emitter region and the collector region.

Protection device and related fabrication methods

ESD protection device structures and related fabrication methods are provided. An exemplary semiconductor protection device includes a first base well region having a first conductivity type, a collector region of the opposite conductivity type, and a second base well region having a dopant concentration greater than the first base well region, and a portion of the second base well region is disposed between the first base well region and the collector region. A third base well region with a different dopant concentration is disposed between the collector region and the second base well region. At least a portion of the first base well region is disposed between a base contact region and an emitter region within the second base well region.

ESD protection device and related fabrication methods

An electrostatic discharge (ESD) protection device includes a semiconductor substrate comprising a buried insulator layer and a semiconductor layer over the buried insulator layer having a first conductivity type, and first and second bipolar transistor devices disposed in the semiconductor layer, laterally spaced from one another, and sharing a common collector region having a second conductivity type. The first and second bipolar transistor devices are configured in an asymmetrical arrangement in which the second bipolar transistor device includes a buried doped layer having the second conductivity type and extending along the buried insulator layer from the common collector region across a device area of the second bipolar transistor device.

Growing community of inventors

Gilbert, AZ, United States of America

Rouying Zhan