Texas Instruments Corporation

Rosemary Urmese Anthraper

Lucius Marshall Sherwin

Ronald Charles Roth

Irma Izzeth Annillo

Georgina Marie Park

A method of forming an electronic device includes providing a patterned lower metal layer over a substrate and a first sacrificial layer there between. A second sacrificial layer is formed over the metal layer, and a portion thereof is removed. A third sacrificial layer is formed over the second sacrificial layer, and an upper metal layer is formed over the third sacrificial layer. A portion of the upper metal layer is removed, and the first, second and third sacrificial layers are removed.

Planarity of pixel mirrors

In a lithography process using an ultraviolet process, the applied ultraviolet resist can be removed by intentionally condensing the ultraviolet resist before removing the ultraviolet resist.

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Richardson, TX, United States of America

Rosemary Urmese Anthraper