Sandia Corporation

Rosemarie A Renn

Michael Baker

Frank J Peter

Jeffrey C Gilkey

Michelle A Duesterhaus

A first-in-first-out (FIFO) microelectromechanical memory apparatus (also termed a mechanical memory) is disclosed. The mechanical memory utilizes a plurality of memory cells, with each memory cell having a beam which can be bowed in either of two directions of curvature to indicate two different logic states for that memory cell. The memory cells can be arranged around a wheel which operates as a clocking actuator to serially shift data from one memory cell to the next. The mechanical memory can be formed using conventional surface micromachining, and can be formed as either a nonvolatile memory or as a volatile memory.

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Alburquerque, NM, United States of America

Rosemarie A Renn