Lam Research Corporation

Roopa Krishnaiah-Felton

Paul Ballintine

Gean Hsu

Jaime Sarmiento

Tina Pai-Lin Ku

Duane Smith

A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling the plasma cluster tool during production. The testing arrangement includes a data manager module for obtaining, via a computer network, specification data pertaining to a component of the plasma cluster tool. The testing arrangement further includes a test manager module configured to provide a set of tests for testing the component, the set of tests incorporating data obtained in the specification data. The testing arrangement additionally includes a SCS interface engine configured to communicate the set of tests with the system control software of the plasma cluster tool, thereby enabling the SCS to execute at least a test in the set of tests to test the component.

Growing community of inventors

Danville, CA, United States of America

Roopa Krishnaiah-Felton