Zeta Instruments, Inc.

Ronny Soetaman

Rusmin Kudinar

Ken K Lee

James Jianguo Xu

Vamsi Mohan Velidandla

Zhen Hou

Ben Garland

A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.

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Fremont, CA, United States of America

Ronny Soetaman