Vlsi Technology, Inc.

Ronney L White

David E Henderson

Forest P Kreiss

An improved shielding assembly is provided for a sputter source which has an anode and cathode target-ring assembly mounted to a cylindrical mounting structure. A cooling assembly for the anode and cathode target-ring assembly is mounted to the distal end of the cylindrical mounting structure. A baffle shield member has an outer flat ring-shaped mounting base-portion which overlies the cooling assembly and from which a baffle portion inwardly extends toward the anode and cathode target-ring assembly. A shield member comprises an annular ring base portion, which is mounted over the outer flat ring-shaped mounting base-portion of the baffle shield member and from which an inner lip portion extends inwardly. The inner lip portion has a rounded contour to provide a smooth base for deposition of a smooth layer of sputtered material on said lip portion. The shield member includes a cylindrical sleeve portion, which is fixed to the annular ring base portion and which extends over the exterior wall of the cylindrical mounting structure to provide shielding of the exterior wall of the cylindrical mounting structure.

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Fremont, CA, United States of America

Ronney L White