The Hong Kong University of Science and Technology

Fuji Electric Co., Ltd.

Rongxiang Wu

Johnny Kin On Sin

Masashi Akahane

Yoshiaki Toyoda

Hitoshi Sumida

Lulu Peng

Xiangming Fang

Shu Yuen Ron Hui

Kin On Johnny Sin

Johnny Kin-On Sin

An isolator is configured by a transmission circuit, a transformer, and a reception circuit. A first coil of the transformer is disposed on a back surface of a first semiconductor substrate; a transmission circuit and a second coil of the transformer are disposed on a front surface. The first coil is embedded within a coil trench, is led out through an embedded via-metal-film to a substrate front surface, and is electrically connected to the transmission circuit. The second coil is disposed on an insulating layer of the substrate front surface. The reception circuit is disposed on a front surface of a second semiconductor substrate. The second coil and the reception circuit are electrically connected to each other by connecting first and third electrode pads disposed respectively on the front surfaces of the first and second semiconductor substrates through wires.

Isolator and method of manufacturing isolator

An integrated capacitor can be fabricated with both electrodes formed by trenches for low resistance. According to one embodiment, the capacitor can comprise a first trench electrode, one or more dielectric layers, and a second trench electrode. The first trench electrode and the second trench electrode can be fabricated in different trenches to improve capacitance density and resistance of the integrated capacitor.

Method and apparatus for an integrated capacitor

In certain aspects of the invention, an isolator is configured by a reception circuit, a transmission circuit, and a transformer. In some aspects, the transmission circuit is disposed in an anterior surface of a semiconductor substrate. The transformer is disposed in a posterior surface of the semiconductor substrate and transmits in an electrically isolated state to the reception circuit, a signal input from the transmission circuit. The transformer is configured by a primary coil and a secondary coil. The primary coil can be configured by a metal film embedded in an oxide film inside a coil trench. The secondary coil can be disposed inside an insulating film covering the primary coil so as to oppose the primary coil and is insulated from the primary coil by the insulating film.

Isolator and isolator manufacturing method

Providing for a monolithic magnetic induction device having low DC resistance and small surface area is described herein. By way of example, the magnetic induction device can comprise a substrate (e.g., a semiconductor substrate) having trenches formed in a bottom layer of the substrate, and holes formed in the substrate between the trenches and an upper layer of the substrate. Additionally, the magnetic induction device can comprise a conductive coil embedded or deposited within the trenches. The magnetic induction device can further comprise a set of conductive vias formed in the holes that electrically connect the bottom layer of the substrate with the upper layer. Further, one or more integrated circuit components, such as active devices, can be formed in the upper layer, at least in part above the conductive coil. The vias can be utilized to connect to integrated circuit components with the conductive coil, where suitable.

Monolithic magnetic induction device

Methods and apparatus described herein are associated with integrated magnetic induction devices. A magnetic induction device can include a groove formed in a substrate, a magnetic core included in the groove and surrounded by a conductive winding that is adjacent to portion(s) of the substrate, and respective insulation layers included between the substrate and the conductive winding and between the magnetic core and the conductive winding. An inductor can further include conductive vias formed in the substrate and connected to respective portions of the conductive winding. Further, a transformer can include a groove formed in a substrate, a closed-loop/gapped magnetic core included in the groove and surrounded by first and second conductive windings that are adjacent to respective portions of the substrate, and respective insulation layers formed between the substrate and the first and second conductive windings, and between the closed-loop/gapped magnetic core and the first and second conductive windings.

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Hong Kong, China

Rongxiang Wu