Cymer, Inc.

Rong (Lauren) Liu

Thomas Patrick Duffey

Robert A Bergstedt

Rajasekhar Rao

Hong Ye

Daniel Brown

John Viatella

James J Ferrell

Slava Rokitski

Ray Cybulski

Alex Ershov

An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.

Very high power laser chamber optical improvements

Growing community of inventors

San Diego, CA, United States of America

Rong (Lauren) Liu