Tel Aviv University

Orbotech Limited

Ronen Levy

Ofer Saphier

Shlomo Ruschin

Ariel Danan

An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.

Optical inspection system and method

A sensor () and corresponding method for sensing variations in a parameter employ an optical device () defining two optical paths () differentially affected by a variation in the parameter so as to change the differential phase between the two paths. This differential phase is monitored by a spectral interrogation arrangement () including a radiation input device () for delivering to the optical device () incident radiation at a plurality of wavelengths, and a reading arrangement () for measuring the interference-modulated optical output. The optical device () is configured so that the two optical paths have differing dispersion properties such that a difference between the phase accumulated by light propagating along the optical paths as a function of wavelength exhibits a maximum or minimum at some wavelength designated &#x3bb;. The plurality of wavelengths employed by the spectral interrogation arrangement span a range of wavelengths including, or adjacent to, &#x3bb;.

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Tel Aviv, Israel

Ronen Levy