Applied Materials Israel Limited

Ronen Hagai

Yuval Gronau

Efim Vinnitsky

Barak Dee-Noor

Yohanan Madmon

Chun-Hsiang Yen

A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.

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Kiryat Ekron, Israel

Ronen Hagai