Boston University

Ecole Polytechnique Federale De Lausanne

Ronen Adato

Hatice Altug

Bennett B Goldberg

M Selim Unlu

Shyamsunder Erramilli

Ajay Joshi

Alp Artar

Ahmet Ali Yanik

Serap Aksu

Min Huang

The present invention generally relates to nanoantenna arrays and fabrication methods of said nanoantenna arrays. In particular, one aspect relates to nanoantenna arrays including nanostructures of predefined shapes in predefined patterns, which results in collective excitement of surface plasmons. The nanoantenna arrays can be used for spectroscopy and nanospectroscopy. Another aspects of the present invention relate to a method of high-throughput fabrication of nanoantenna arrays includes fabricating a reusable nanostencil for nanostensil lithography (NSL) which provides a mask to deposit materials onto virtually any support, such as flexible and thin-film stretchable supports. The nanostencil lithography methods enable high quality, high-throughput fabrication of nanostructures on conducting, non-conducting and magnetic supports. The nanostencil can be prepared by etching nanoapertures of predefined patterns into a waffer or ceramic membrane. In some embodiments, a nanoantenna array includes plasmonic nanostructures or non-plasmonic nanostructures.

Nanoantenna arrays for nanospectroscopy, methods of use and methods of high-throughput nanofabrication

Optical verification testing of an IC includes obtaining images of the IC by, for each image: (i) illuminating the IC with excitation light, wherein the excitation light corresponds to a respective specific optical excitation of a predefined spectrum of optical excitations (e.g., wavelength spectrum); and (ii) detecting scattered light from the IC in response to the specific optical excitation. For each of a set of sub-regions of the images, the respective sub-region is mapped to at least one of (i) a specific sub-unit of a predefined set of sub-units (e.g., gates) of the IC and (ii) a null result, thereby creating a representation of a detected layout of the IC as an arrangement of the sub-units. The representation can be used to verify that an as-fabricated layout is consistent with an as-designed layout, to detect unauthorized modifications of the IC structure.

Gate-level mapping of integrated circuits using multi-spectral imaging

The present invention relates to an infrared absorption spectroscopy apparatus including an infrared transparent substrate comprising a first and second surface, an array of plasmonic nano-antennas arranged on the first surface of the infrared transparent substrate, a flow cell for holding a liquid to allow spectroscopy measurements in a liquid environment, the array of plasmonic nano-antennas being located inside the flow cell, an optical source providing an incident light probe signal incident on at least a part of the array of plasmonic nano-antennas via the second surface of the infrared transparent substrate, and an optical element to collect reflected light signal reflected by said part of the array of plasmonic nano-antennas.

Infrared absorption spectroscopy

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Ronen Adato