Asml Holding N.v.

Ronald Peter Totillo

Matthew Lipson

Tammo Uitterdijk

Vincent Dimilia

Steven Michael Zimmerman

An electrostatic clamp () and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer () having a first ultra-low expansion (ULE) material, a second layer () coupled to the first layer, having a second ULE material, and a third layer (), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels () located between the first layer and the second layer and a composite layer () interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.

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Brookfield, CT, United States of America

Ronald Peter Totillo