Advanced Silicon Materials LLC

Ronald O Russell

Howard J Dawson

David W Keck

Disclosed are processes and reactor apparatus for rapidly producing large diameter, high-purity polycrystalline silicon rods for semiconductor applications. A.C. current, having a fixed or variable high frequency in the range of about 2 kHz to 800 kHz, is provided to concentrate at least 70% of the current in an annular region that is the outer 15% of a growing rod due to the &ldquo;skin effect.&rdquo;

Chemical vapor deposition system for polycrystalline silicon rod production

Disclosed are processes and reactor apparatus for rapidly producing large diameter, high-purity polycrystalline silicon rods for semiconductor applications. A.C. current is provided to the rods by a power supply, having a fixed or variable high frequency in the range of about 2 kHz to 800 kHz, to concentrate at least 70% of the current in an annular region that is the outer 15% of a rod due to the &ldquo;skin effect.&rdquo;

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Anaconda, MT, United States of America

Ronald O Russell