Koninklijke Philips Corporation N.v.

Asml Netherlands B.v.

Asm Technology Singapore Pte Ltd

Ronald Maarten Schneider

Jakob Vijfvinkel

Geert-Jan Darwinkel

Mattheus Jacobus Van Der Meer

Johannes Cornelius Antonius Muller

Jacob Brinkert

Rob Tabor

Peter Adrianus Albert Kemps

Marcel J M Renkens

Eric W A Janssen

Theo H J Bisschops

Jan Van Eijk

Michel Marcel Jose Decre

Johannes Cornelis Driessen

Jeroen Dekkers

Jan Willem Bruggers

Hugo Matthieu Visser

Robertus Mathijs Gerardus Rijs

Theodorus H J Bisschops

Marinus Josephus Jakobus Dona

Marinus J J Dona

Jasper Anne Frido Marikus Simons

Michel A Mors

Mark T Meuwese

Timotheus Hubertus Christiaan Groothuijsen

Michel M J Decre

A positioning table, for example for a wire bonder has first and second arms, each of said first and second arms being independently drivable linearly along a first axis, and a stage that is engaged with both the first and second arms. The stage engages with each of the first and second arms via a respective engagement mechanism such that the stage is movable both linearly along the first axis, and rotatable about a rotary axis coincident with a center-point of the stage, the rotary axis being orthogonal to the first axis. Each engagement mechanism is configured to permit a respective distance between the center-point of the stage and an end of each of the first and second arms to vary during movement of an arm along the first axis.

Y-theta table for semiconductor equipment

A shaver includes a shaving unit having e.g., three shaving elements. Each shaving element accommodates a cutter member for cutting off hairs. Each shaving element further accommodates a gear wheel which is part of a transmission for coupling a drive shaft for driving the cutter member to an output shaft of a motor of the shaver. A top side of a space where the gear wheel is located is covered by a partition, where only the drive shaft extends through this partition. Each shaving element can be individually opened by removing a top portion of the shaving element, including the cutter member, from a base portion of the shaving element where the gear wheel, the drive shaft and the partition are located. An opening system may be provided to open all the shaving elements in one action by reversal of the direction of rotation of the output shaft, for example.

Shaver having spaces for collecting cut-off hairs

A device () comprises at least a body () and a bumper () which is movably attached to the body so as to protect the body from shock caused by collision with an obstacle during movement of the device across a surface. The bumper is attached to the body by means of at least one spring () extending in a direction which is at least substantially perpendicular to the direction into which the bumper is movable with respect to the body. Furthermore, a robot cleaner comprising such a device is provided.

Device comprising at least a body and a bumper, and robot cleaner comprising such a device

A device () for transferring a pattern () from a stamp () to a substrate () comprises a table () for supporting a substrate (), a flexible stamp () and a movably arranged body () having a pressure chamber () for exerting pressure on a portion of the stamp (), so that the portion is pushed toward the substrate () and contacts the substrate (). During a pattern transferring process, the body () is moved. As a result, adjacent portions of the stamp () successively go through a process of being pushed toward the substrate (), getting in contact with the substrate (), and being allowed to move back in place again. In this way, it is achieved that the pattern () of the stamp () is transferred to the substrate (), without the introduction of vibrations, so that the transfer of the pattern () takes place in a highly accurate fashion.

Method and device for transferring a pattern from a stamp to a substrate

In a lithographic projection apparatus, a slider is provided for motion of the substrate table or mask table. The slider is supported on a gas-bearing and separates a region at atmospheric pressure from a vacuum space region. A differential pressure pump is provided to maintain the pressure difference in the presence of the gas-bearing. A pressure compensation vessel is provided on top of the slider and also contains a vacuum. Over most of the area of the slider, the pressure on its opposed first and second sides is the same and so deformation of the slider is avoided. The sidewalls of the pressure compensation vessel transmit the external gas pressure to the slider such that they are in line with the forces of the gas-bearing.

Lithographic apparatus and device manufacturing method

A reference frame provided in a vacuum chamber is supported by support pillars extending through and isolated from the vacuum chamber walls to isolate the reference frame from vibrations in the vacuum chamber. The gap between the support pillar and the vacuum chamber wall may be sealed by a low-stiffness seal. The low stiffness seal may be a three part seal allowing relative motion in six-degrees of freedom.

Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses

A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Growing community of inventors

Eindhoven, Netherlands

Ronald Maarten Schneider