Praxair Technology, Inc.

Occidental Chemical Corporation

Other

Ronald F Spohn

David Walter Peters

Ashwini K Sinha

Michael J Fifolt

William S Derwin

Michael C Savidakis

David C Johnson

Daniel R Thielen

Jeffrey S Stults

Lloyd Anthony Brown

Mohan Singh Saran

Scott Houston Meiere

David Michael Thompson

Lisa A Fanti

Serge Marius Campeau

Ranko Bursac

Robert A Buchanan

Ozlem Yardimci

Robert L Bell

Stanley M Smith

John D Peck

Carl B Richenberg

Arthur H Morth

Murat Gunay

Qiong Guo

Carl Richenberg

Frank J Sapienza, Jr

Raymond T Olczak

David M Thompson

Disclosed are articles useful as the body of a container for containing gas under pressure, and containers which comprise the articles to which are affixed valves to control the flow of gas out of the container, wherein the articles comprise a hollow container body, having an external surface and having an opening through which gas can enter or leave the interior of the hollow container body; optionally but preferably a layer of fiber-reinforced polymer around the exterior of the container body, and an external layer of elastomer around and sealed to the external surface of the layer of fiber-reinforced polymer if present or else to the cylinder body.

Container for pressurized gas

Novel cylinder passivation procedures to increase the room temperature stability of gaseous tin deuteride (SnD) are described. Incorporation of specific organic-containing materials, which when applied onto surfaces of a vessel and/or conduit extending therefrom, can increase the shelf life stability of thermodynamically unstable gases stored within such pretreated vessels.

Cylinder preparation for maintaining stability of stored materials

A pressure indicating device for detecting and isolating leakage of toxic and/or pyrophoric gasses from within various packages is disclosed. The device can affix to a user port of a cylinder package. The device has a flexible disc-like structure which is fine tuned to outwardly flex in response to a build-up of pressure of the gas exerted against the disc-like structure. The flexed disc contacts a movable pin and pushes the push outwards from within the device. The outward movement of the pin pierces a paper seal extending over the device, thereby indicating a leak from within the valving of the package. The device withstands the pressure exerted against it, thereby also isolating the leak of the pressurized gas.

Pressure indicating device

This invention relates to a vapor or liquid phase reagent dispensing apparatus having a metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of said metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Reagent dispensing apparatus and delivery method

This invention relates to vapor phase reagent dispensing apparatus having a bubbler tube and also a metal seal aligned and in contact with the hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Bubbler apparatus and delivery method

This invention relates to a vapor phase reagent dispensing apparatus having a bubbler tube and also a metal seal aligned and in contact with the hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The apparatus further has a temperature sensor and a source chemical level sensor extending through a centrally located portion of the top wall member and generally vertically downwardly to a sump cavity centrally located on a bottom wall member. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Bubbler apparatus and method for delivering vapor phase reagent to a deposition chamber

This invention relates to a liquid phase reagent dispensing apparatus having a diptube and also a metal seal aligned and in contact with the hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The apparatus further has a temperature sensor and a source chemical level sensor extending through a centrally located portion of the top wall member and generally vertically downwardly to a sump cavity centrally located on a bottom wall member. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Diptube apparatus and method for delivering vapor phase reagent to a deposition chamber

This invention relates to a vapor or liquid phase reagent dispensing apparatus having a metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The apparatus also has a temperature sensor and a source chemical level sensor extending through a centrally located portion of the top wall member and generally vertically downwardly to a sump cavity centrally located on a bottom wall member. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Apparatus and method for delivering vapor phase reagent to a deposition chamber

This invention relates to a vapor or liquid phase reagent dispensing apparatus having a diptube and also a metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Diptube apparatus and delivery method

This invention relates to organometallic compounds represented by the formula (L)M(L)wherein M is a metal or metalloid, Land Lare different and are each a hydrocarbon group or a heteroatom-containing group;is a value of at least 1;is a value of at least 1;+is equal to the oxidation state of M; and wherein (i) Lhas a steric bulk sufficiently large such that, due to steric hinderance,cannot be a value equal to the oxidation state of M, (ii) Lhas a steric bulk sufficiently small such that, due to lack of steric hinderance,can be a value equal to the oxidation state of M only in the event thatis not a value of at least 1, and (iii) Land Lhave a steric bulk sufficient to maintain a heteroleptic structure in which+is equal to the oxidation state of M; a process for producing the organometallic compounds, and a method for producing a film or coating from organometallic precursor compounds.

Heteroleptic organometallic compounds

Disclosed is a method of isolating the aromatic product formed when a substrate having the general formula

Isolation of products from selective dehalogenation of haloaromatics

Disclosed is a method of adding 1 to 4 chlorine or bromine atoms to an aromatic ring of compound that has at least one electron-withdrawing groups on that ring. The aromatic compound is reacted with a chlorinating agent or a brominating agent in the presence of about 0.1 to about 10 mole % of a Lewis acid catalyst and about 0.001 to about 0.1 equivalents of an iodine-containing cocatalyst at a temperature of ambient to about 100.degree. C.

Chlorination and bromination of aromatic compounds at atmospheric

Disclosed is a method of removing an acid halide, anhydride, or ester impurity from a mixture with a desired product with which it codistills. At least about a stoichiometric amount of a primary or secondary amine having a boiling point at least 10.degree. C. higher or lower than the boiling point of said desired product is added to the mixture. The desired product is not an acid halide, anhydride, or ester and does not react with the amine. The amine forms a reaction product with the impurity that has a boiling point at least 10.degree. C. higher or lower than the boiling point of the desired product. The mixture is distilled to isolate the desired product.

Removal of an impurity from a mixture with a codistillant

Disclosed is a method of making an aromatic nitrile by reacting a benzotrichloride having the formula ##STR1## with a source of ammonia, where Z is R, X, ##STR2## --ROR, or --OR, R is alkyl from C.sub.1 to C.sub.20 or aryl from C.sub.1 to C.sub.25, X is halogen and n is 0 to 5. The reaction is performed in the presence of 0.01 to about 5 wt % of a catalyst having the general formula M.sub.P/2 O or MX.sub.p .cndot.mH.sub.2 O and about 0.01 to about 5 wt % water, as free water or water of hydration, based on the weight of the benzotrichloride, where M is beryllium, magnesium, calcium, strontium, or barium, m is 0 to 6, and p is the valence of M.

Growing community of inventors

Getzville, NY, United States of America

Ronald F Spohn