The Perkin-elmer Corporation

Ulvac-phi, Incorporated

Physical Electronics Usa, Inc.

Ronald E Negri

Paul E Larson

Robert L Gerlach

David G Watson

Gregory L Fisher

Dennis F Paul

David H Narum

Scott R Bryan

Surface imaging apparatuses, surface analysis apparatuses, methods based on detection of secondary electrons or secondary ions that include a spatially scanned and DC or pulsed primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample; and dual polarity flood beams to effect neutralization of surface charge and surface potential variation.

Methods and systems including pulsed dual-beam charge neutralization

A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically connect the sample to the sample support member (e.g., wherein the sample support member is configured for application of a retarding bias potential). A grounded sample aperture member defining an aperture relative to the sample support member but electrically isolated therefrom is provided such that the aperture is proximate the sample receiving surface to expose at least a portion of a surface of a sample received thereon to be analyzed (e.g., wherein applying a retarding bias potential to the sample support member produces an electrical retarding field about the aperture that reduces the energy of emitted particles from a sample before they enter an annular-acceptance analyzer).

Sample holder apparatus to reduce energy of electrons in an analyzer system and method

A charged-particle energy analyzer includes a hollow axisymmetrical body with an annular opening therein receptive of input electrons from a cylindrical mirror analyzer, the electrons having a distribution of electron energies and a range of electron trajectories. The trajectories each have a radially inward directional component and an axial directional component in a forward direction parallel to the axis. Annular deflectors with negative potentials are disposed coaxially in the body so as to reverse the axial directional components of the electron trajectories. A ring-shaped channel detector detects the electrons relative to radial distance and thereby to energy.

Multichannel charged-particle analyzer

Growing community of inventors

Minnetonka, MN, United States of America

Ronald E Negri