Thermtec, Inc.

Ronald E Erickson

Kevin B Peck

Stephen H Matthews

William D McEntire

Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.

Apparatus for positioning a furnace module in a horizontal diffusion

High performance horizontal diffusion furnace system

Thermocouple for a horizontal diffusion furnace

Cooling system for a horizontal diffusion furnace

The furnace 70 includes a heating element 72 which is restrained from growth during operation of the furnace 70 by retaining spacers 84 which provide a yoke 88 around the individual coils 102 of the heating element 72 and which spacers 84 are interlocked with each other. A high alumina fiber insulation 180 is applied to insulate the heating element 72. This high alumina fiber insulation 180 has enhanced properties with respect to shrinkage and devitrification.

High temperature diffusion furnace

An energy efficient heating element (10) is set forth which includes a resistance wire (15). The wire (15) has a diameter at 20.degree. C., d, and has a generally sinuated configuration defining a plurality of loops (30). The wire (15) is bent backwards centrally (32) to form first (34) and second (36) generally parallel sections with the loops defining alternately inwardly facing (38a) and outwardly facing (38b) concavities (38a,38b) which have respective interior sections (40a,40b) and mouths (42a, 42b). The interior sections (40a,40b) generally have diameters of at least about 3d at 20.degree. C. The mouths (42a,42b) have dimensions of less than the diameters of the interior sections (40a,40b) but at least about 2d at actual operating temperature. The closest approaching portions of loops (30) are separated by at least 2d at operating temperature. The wire (15) defines a generally continuous body (44) of thickness, d, at 20.degree. C. The wire (15) is embedded within a ceramic fiber insulating material (14) closely adjacent to a first surface (16) thereof. A black high temperature resistant coating (26) covers the first surface (16).

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Jamestown, CA, United States of America

Ronald E Erickson