Other

Ronald E Blazo

Vladimir Schwartz

Michael Schwartz

Klaus M Bierwagen

Doron Dagan

A system and method for electro-forming a metal layer on a substrate. The system has a rotary jet planarizer in an electro-forming or galvanic cell. The cell includes a toroidally-shaped manifold with two inlets and an outlet. Each of the inlets is coupled to tubing from a sump assembly. Pressurized electrolyte flows from the sump assembly to the manifold. Directly downstream from the manifold is a diffuser having a plurality of openings. Electrolyte flows through the diffuser to an toroidally-shaped anode basket filled with metal pellets. After flowing through the anode basket, the electrolyte flows to a rotary jet planarizer. The planarizer has a rotatable plate with a main opening, a plurality of apertures radially extending from the main opening, and a conduit that is coupled to the main opening and extends out of the cell. A motor is coupled to the rotary jet planarizer to rotate the plate. The rotating plate directs the electrolyte to a cathode assembly in multiple streams so that the electrolyte washes evenly over a wide, ring-shaped area of a glass master held in a cathode assembly. A layer of metal is galvanically deposited on the glass master. Flow of electrolyte in the cell may follow one of two patterns: a radial pattern or a central pattern. Electrolyte may flow through two returns positioned adjacent to the rotary jet planarizer, one on each side of the cell or through the conduit coupled to the main opening in the plate. The two returns and conduit are coupled to the sump assembly, where the electrolyte is filtered and then pumped back to the cell.

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Shirley, MA, United States of America

Ronald E Blazo