Sandia Corporation

Ronald C Dykhuizen

Daniel John Rader

John R Torczynski

John E Brockmann

Anthony S Geller

Richard A Neiser

Mark F Smith

A new type of aerodynamic particle beam generator is disclosed. This generator produces a tightly focused beam of large material particles at velocities ranging from a few feet per second to supersonic speeds, depending on the exact configuration and operating conditions. Such generators are of particular interest for use in additive fabrication techniques.

Aerodynamic beam generator for large particles

A method of reducing particle deposition during the fabrication of microelectronic circuitry is presented. Reduction of particle deposition is accomplished by controlling the relative temperatures of various parts of the deposition system so that a large temperature gradient near the surface on which fabrication is taking place exists. This temperature gradient acts to repel particles from that surface, thereby producing cleaner surfaces, and thus obtaining higher yields from a given microelectronic fabrication process.

Reduction of particle deposition on substrates using temperature

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Albuquerque, NM, United States of America

Ronald C Dykhuizen