Axcelis Technologies, Inc.

Ronald A Capodilupo

Alexander S Perel

Michael A Graf

Jiong Chen

Philip J Ring

Scott T Barusso

Phil J Ring

Kui Jin

An image monitor system monitors characteristics of an ion beam employed in ion implantation. The monitored characteristics can include particle count, particle information, beam current intensity, beam shape, and the like. The system includes one or more image sensors that capture frames or images along a beam path of an ion beam. An image analyzer analyzes the captured frames to obtain measured characteristics. A controller determines adjustments or corrections according to the measured characteristics and desired beam characteristics.

Ion beam monitoring in an ion implanter using an imaging device

A filament (,) for an ion implanter ion source or plasma shower is provided comprising first and second legs (,) and a thermally emissive central portion (,) having ends connected, respectively, to the first and second legs. Preferably, the legs (,) are constructed from tantalum (Ta), and the thermally emissive portion (,) is constructed of tungsten (W). The thermally emissive portion is coiled substantially along the entire length thereof and formed in the shape of a generally closed loop, such as a toroid. The toroid is comprised of two toroid halves (,) coiled in opposite directions. The toroid halves are constructed of a plurality of filament strands (,) twisted together along substantially the entire length thereof. The coils of the toroid are capable of establishing closed loop magnetic field lines (B) therein when electrical current flows through the thermally emissive portion. The closed loop magnetic field lines (B) confine electrons (E) emitted from the surface of the thermally emissive portion within the confines of the coils.

Toroidal filament for plasma generation

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Beverly, MA, United States of America

Ronald A Capodilupo