Applied Materials, Inc.

Ron Serisky

Steven M Anella

Dawei Sun

Qin Chen

Julian G Blake

Dale K Stone

D Jeffrey Lischer

Lyudmila Stone

David J Chipman

Chi-Yang Cheng

A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.

Enhanced substrate temperature measurement apparatus, system and method

A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate.

Carbon nanotube electrostatic chuck

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Gloucester, MA, United States of America

Ron Serisky