Novellus Systems Incorporated

View, Inc.

Soladigm, Inc.

Ron Powell

Dhairya Shrivastava

Sridhar Karthik Kailasam

Robin Friedman

Rao P Mulpuri

Shawn M Hamilton

Michael Rivkin

Michael Nordin

Michal Danek

Erich R Klawuhn

Juwen Gao

Sean C Chang

Wei Lei

Window units, for example insulating glass units (IGU's), that have at least two panes, each pane having an electrochromic device thereon, are described. Two optical state devices on each pane of a dual-pane window unit provide window units having four optical states. Window units described allow the end user a greater choice of how much light is transmitted through the electrochromic window. Also, by using two or more window panes, each with its own electrochromic device, registered in a window unit, visual defects in any of the individual devices are negated by virtue of the extremely small likelihood that any of the visual defects will align perfectly and thus be observable to the user.

Multi-pane electrochromic windows

A semiconductor processing tool heats wafers using radiant heat and resistive heat in chamber or in a load lock where pressure changes. The wafers are heated in greater part with a resistive heat source until a transition temperature or pressure is reached, then they are heated in greater part with a radiant heat source. Throughput improves for the tool because of the wafers can reach a high temperature uniformly in seconds.

Load lock design for rapid wafer heating

Methods of improving the adhesion of low resistivity tungsten/tungsten nitride layers are provided. Low resistivity tungsten/tungsten nitride layers with good adhesion are formed by treating a tungsten or tungsten nitride layer before depositing low resistivity tungsten. Treatments include a plasma treatment and a temperature treatment. According to various embodiments, the treatment methods involve different gaseous atmospheres and plasma conditions.

Method for improving adhesion of low resistivity tungsten/tungsten nitride layers

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Portola Valley, CA, United States of America

Ron Powell