Digitaloptics Corporation Mems

Siimpel Corporation

Mems Drive, Inc.

California Institute of Technology

Siwave, Inc.

Mems Start, LLC

Tessera Mems Technologies, Inc.

Digital Optics Corporation

The Boeing Company

The United States of America As Represented by the Administrator of the

Mems Drive (nanjing) Co., Ltd.

Other

Samsung Electronics Co., Ltd.

Hughes Electronics Corporation

Flir Systems Trading Belgium Bvba

Roman Gutierrez

Robert J Calvet

Guiqin Wang

Xiaolei Liu

Tony Kai Tang

Ankur Jain

Matthew Ng

Jing Xu

Kumaraswamy Jayaraj

Darrell Harrington

Tony Tang

Pat K Leang

Alexandru Drimbarean

A Dorian Challoner

Corneliu Zaharia

Jose A Mendez

Petronel Bigioi

Gerardo Morabito

Shi-Sheng Lee

Eric R Fossum

William J Kaiser

Damien Craig Rodger

Christopher I Walker

Kirill V Shcheglov

Christopher Bryan Stell

Vatche Vorperian

Jim Schmieder

William Hudson Welch

David Ovrutsky

Donald R Cargille

Jaroslava Z Wilcox

Thomas R Vanzandt

Davy Tong

Stephen Eric Vargo

Robert John Calvet

Benson Mai

Stephen E Vargo

Roberto J Rodriguez

Tim Quang-Tinh Ngo

Edouard G H Schmidtlin

Cathleen Jones

Kirill Shcheglov

Jaroslava Wilcox

Hongyu Wang

Randall K Bartman

Shawn Maloney

Lakshminarayan Hariharan

Petronel Gheorghe Bigioi

A diagnostic mask and method of diagnosing are disclosed. The method includes collecting data from a plurality of sensors in a mask placed on a patient's face such that the mask covers the patient's eyes, the data representing a plurality of health signs of the patient, wherein at least one of the health signs relates to the patient's eyes; and transmitting a signal from the mask, the signal representing the data representing the plurality of health signs.

Diagnostic mask and method

Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

MEMS actuator structures resistant to shock

An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

Multi-directional actuator

The disclosure describes the use of image sensors in a variety of different imaging applications. In some implementations, the pixels of an image sensor may be configured (e.g., programmed) with one or more analog filters to sense a variety of things, including, for example: average intensity and color (like a standard camera), 3D depth (like a time of flight or structured light camera), changes and/or motion in an image (like an event based camera), spectral reflectance (like a spectroscopy camera), and many other features of an imaged scene or object. In alternative implementations, digital filtering may be applied to the output of an image sensor to realize one of these applications.

Filtering imaging system including a light source to output an optical signal modulated with a code

A method of making a lens assembly is provided, including: providing a first plurality of lenses; providing a lens barrel; receiving the first plurality of lenses in the lens barrel; fixedly aligning the first plurality of lenses in the lens barrel; providing at least one additional lens having at least one degree of freedom of movement with respect to the first plurality of lenses; and fixing the at least one additional lens in a desired alignment position with respect to the first plurality of lenses.

Miniature lens assembly and method of making same

In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.

MEMS-based optical image stabilization

A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

Comb drive with non-parallel overlapping comb fingers

In one embodiment, a device is provided that includes: a plurality of actuators arranged into a plurality of rows and a plurality of columns; a plurality of row conductors corresponding to the plurality of rows; a plurality of column conductors corresponding to the plurality of columns; and a controller configured to select at least one of the actuators in a row by raising a voltage on the corresponding row conductor to couple each selected actuator to its corresponding column conductor.

Row and column actuator control

A device may comprise a substrate formed of a first semiconductor material and a trench formed in the substrate. A second semiconductor material may be formed in the trench. The second semiconductor material may have first and second portions that are isolated with respect to one another and that are isolated with respect to the first semiconductor material.

MEMS isolation structures

An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.

Actuator for moving an optoelectronic device

Embodiments of the technology disclosed herein provide filtering pixels for performing filtering of signals within the pixel domain. Filtering pixels described herein include a hybrid analog-digital filter within the pixel circuitry, reducing the need for computationally intensive and inefficient post-processing of images to filter out aspects of captured signals, and account for ineffectiveness of optical filters.

Systems and methods for derivative sensing using filtering pixels

Systems and apparatuses are provided for increasing the possible force and/or travel generated in MEMS devices. For example, comb fingers may be utilized to form a strain actuator to generate larger forces. As another example, the force advantage of a parallel plate actuator is leveraged while also leveraging the travel advantage of comb drives to increase force and/or travel capable of being generated. The systems and apparatuses disclosed may utilize one or more comb drives operationally attached to one or more flexures and/or frames.

Flexure shear and strain actuator

A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

Motion controlled actuator

Growing community of inventors

Arcadia, CA, United States of America

Roman Gutierrez