Siemens Aktiengesellschaft

Rolf-Winfried Schulte

Johann Kammermaier

Wolfgang Kleeberg

Gerhard Rittmayer

Wolf Kleeberg

Starting from hydrocarbons and/or fluorocarbons, glow polymerisate layers can be generated on a substrate by means of a high-frequency low-pressure glow discharge. Chemically stable layers are obtained if the glow polymerisate is subjected, after the preparation and with the exclusion of air, to an annealing process in an atmosphere of hydrocarbon and/or fluorocarbon monomers at temperatures between 100.degree. and 450.degree. C. for 1 to 10 hours, or if the substrate is heated to temperatures between 100.degree. and 450.degree. C. during the preparation of the glow polymerisate.

Method for generating glow-polymerisate layers

Glow polymerisate layers can be generated on a substrate, starting from hydrocarbons and/or fluorocarbons, by means of a high-frequency, low-pressure glow discharge. Glow polymerisates completely saturated with hydrogen or fluorine are obtained when the glow discharge is carried out in the microwave range between 0.5 and 1.000 GHz and if the amplitude E.sub.0 of the effective field strength in the vicinity of the substrate no greater than 850 V/cm.

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Erlangen, Germany

Rolf-Winfried Schulte