Max-planck-gesellschaft Zur F&#xf6;rderung Der Wissenschaften E. V.

Leybold Aktiengesellschaft

Rolf Wilhelm

Michael Geisler

Jorg Kieser

Paul G Schuller

Eberhard Rauchle

Gunther Muller

The invention relates to an apparatus for producing a plasma and treating substrates therein. The plasma produced by means of microwaves serves to coat a substrate which is situated in a chamber (5) having metal walls (6,7,12,13). The microwaves are repeatedly reflected at the metal walls (6,7,12,13), so that the chamber (5) has numerous microwave modes. By means of permanent magnets, which are placed either inside the chamber (5) or outside the chamber (5) in the vicinity of the substrate that is to be coated, it is possible to produce within this chamber (5) an electron-cyclotron resonance which permits a locally controlled ignition of the plasma.

Process for depositing silicon oxide on a substrate

The plasma produced by means of microwaves in the presence of a magnetic field and a gas serves to coat a substrate which is situated in a chamber having metal walls. The microwaves are repeatedly reflected at the metal walls, so that the chamber has numerous microwave modes. By means of permanent magnets, which are placed either inside the chamber or outside the chamber in the vicinity of the substrate that is to be coated, it is possible to produce within this chamber an electron-cyclotron resonance which permits a locally controlled ignition of the plasma.

Apparatus for producing a plasma and for the treatment of substrates

A microwave plasma method/of depositing a coating of a prescribed material on the internal surface of a pipe by means of a reaction of a vapor phase providing a prescribed material in which:

Method and apparatus for PCVD internal coating a metallic pipe by means

A fluid-tight coupling device for microwave radiation of high energy incls a tubular dielectric window which is sealingly connected to one end of a waveguide supplying the microwave radiation and forms a continuation of the waveguide. The other end of the tube forming the window is tightly sealed by an essentially conical reflector. The tube forming the window is surrounded on the outside by a cup-shaped waveguide portion. The reflecting surface of the reflector and the reflecting inner surface of the cup-shaped waveguide portion are formed such that the microwave radiation emerging from the waveguide is reflected through the tubular window into the cup-shaped waveguide portion and from the latter to the open end of the waveguide portion in such a manner that an input mode of type TE.sub.mn is transformed into itself or a well-defined adjacent mode TE.sub.m'n', further secondary modes are minimized and at the same time return waves are also minimized. Due to the cylidrical form a window area of one or two orders of magnitude larger than in the known plane windows is obtained and thus a correspondingly smaller area stress so that even very high microwave powers can be transmitted.

Fluid-tight coupling device for microwaves

A microwave absorber with a microwave-absorbing material, a protective hong surrounding this, and a waveguide leading into the protective housing, through which waveguide the microwaves to be absorbed can be conducted to the absorbing material, the microwave-absorbing material forming a solid body with a hollow, on one side of which the waveguide opens, a termination element being arranged on the side of the hollow opposite to the waveguide, and the housing being provided with an inlet and an outlet for a cooling fluid.

Microwave absorber using gaseous cooling fluid

A microwave calorimeter for very high power, with a housing, which surrou a feed chamber, into which a waveguide runs for feeding the microwaves, and an absorber-chamber which is separated from the feed chamber by a dielectric wall and contains a microwave-absorbing fluid, the fluid consisting at least in part of a compound whose capacity for the absorption of microwaves is less than that of water.

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Calw-Stammheim, Germany

Rolf Wilhelm