Trumpf Huettinger Gmbh + Co. Kg

Testo Se &co., Kgaa

Abb Research Ltd.

Trumpf Huttinger Gmbh + Co. Kg

Rolf Merte

Thomas Kirchmeier

Christian Bock

Michael Glueck

Peter Wiedemuth

Markus Winterhalter

Martin Stratmann

Ekkehard Mann

Moritz Nitschke

Guntram Scheible

Daniel Krausse

Wolfgang Oestreicher

Thomas Keul

Michael Glück

Markus Bannwarth

Christian Fritsch

Martin Steuber

Ulrich Heller

Ralf Stich

Heinrich Deckmann

Krishna Kishore Nedunuri

Yannic Baeuchle

Matthias Wegner

Markus Langenbacher

Ralf Huck

Dietmar Overhoff

A measuring assembly for detecting particles of a particle flow in a gas flow path, including an ionization stage which has an ionization device by which the particles to be detected can be ionized or are ionized. The measuring assembly further has measuring stage with a detector which detects the ionized particles of the particle flow, the detector has at least one electrode to which particles release the charge received at the ionization device. The released charge can be measured via an electric resistor connected to the at least one electrode. This provides an inexpensive and reliable measuring assembly which has a low susceptibility to errors in that the at least one electrode of the detector is designed as a microsystem. In order to improve the measurement of the charge carried by the ionized gas, the pores of a filter substrate are metallized and electrically connected to the resistor.

Particle measuring device in a gas flow path

A method for producing an arc detection signal on the basis of a plurality of observation signals comprises producing an arc detection part-signal for each of at least two observation signals. Producing each of the part-signals includes correlating the respective observation signal with a correlation signal by influencing the correlation signal with the respective observation, thereby producing a correlation result; producing or modifying a coefficient on the basis of the correlation result; and weighting the respective observation signal with the coefficient. The arc detection part-signals are added to form the arc detection signal.

Method for producing an arc detection signal and arc detection arrangement

A method for matching the impedance of the output impedance of a high-frequency power supply arrangement to the impedance of a plasma load includes, in a first impedance matching mode, matching the impedance of the output impedance of the high-frequency power supply arrangement by changing the frequency of the high-frequency signal produced. If the frequency is outside a specified frequency range, in a second impedance matching mode the impedance of the output impedance of the high-frequency power supply arrangement is matched by mechanically or electrically modifying a circuit which is arranged downstream of the high-frequency signal producer.

Method for matching the impedance of the output impedance of a high-frequency power supply arrangement to the impedance of a plasma load and high-frequency power supply arrangement

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Freiburg, Germany

Rolf Merte