Steag Hamatech Ag

Roland Wagner

Ulrich Speer

Stephan Leonhardt

Alexander Hupp

Frank Michels

An apparatus is provided for joining together substrates, which have an inner hole, to form a substrate disk. An expandable element is introducible into the inner hole of at least two superimposed substrates. The element is expandable to such an extent that it can come into contact with the inner holes of both of the substrates to close off an intermediate space formed between the substrates relative to the environment. A substrate support is rotatable about an axis of rotation perpendicular to a support surface thereof. A centering device is rotatably coupled with the substrate support and is movable relative thereto in the direction of the axis of rotation. The expandable element is disposed, and is compressible, between the substrate support and the centering device.

Device for joining substrates

In order to reduce cycle times for assembling at least two substrates () in order to form an optical data carrier in a low-pressure chamber (), a method and a device are disclosed wherein an opening () of the low-pressure chamber is sealed in relation to the surrounding environment, the low-pressure chamber is pumped out, a transfer chamber () is formed between a first handling device () arranged in the low-pressure chamber and a second handling device () arranged outside the low-pressure chamber by respectively sealing the opening () of the low-pressure chamber (). The transfer chamber () has a smaller volume than that of the low-pressure chamber (); the substrates () in the transfer chamber () are transferred from the second handling device () to the first handling device (); the substrates are conveyed () with the first handling device () to an assembly station () in the low-pressure chamber when low-pressure chamber is sealed by the second handling device (), and the substrates () are assembled in the assembly station ().

Growing community of inventors

Bretten, Germany

Roland Wagner